Microcantilever Displacement Measurement Using a Mechanically Modulated Optical Feedback Interferometer

Microcantilever Displacement Measurement Using a Mechanically Modulated Optical Feedback Interferometer

Microcantilever motion detection is a useful tool for the characterization of the physical, chemical and biological properties of materials. In the past, different approaches have been proposed and tested to enhance the behavior, size and simplicity of microcantilever motion detectors. In this paper, a new approach to measure microcantilever motion with nanometric resolution is presented. The p...

Novel Optical Design of Folded Fabry-perot Displacement Measurement Interferometer

Due to its high resolution and the large measuring range, laser interferometer has been applied widely to the precision industrial measurement and calibration. Fabry-Perot interferometry was often used for the microdisplacement, because of its common optical path structure being insensitive to the environmental disturbances. In the past researches, some kinds of modified Fabry-Perot interferome...

A mechanically stable laser diode speckle interferometer for surface contouring and displacement measurement

Electronic speckle pattern interferometry (ESPI) is demonstrated using a simple configuration consisting of a wedged window and a beamsplitter. The window serves to produce a reference beam which is in-line with the scattered object beam. The system is almost common-path and therefore provides much better mechanical stability than conventional ESPI configurations, which have widely separated be...

A mechanically stable laser diode speckle interferometer for surface contouring and displacement measurement

Electronic speckle pattern interferometry (ESPI) is demonstrated using a simple configuration consisting of a wedged window and a beamsplitter. The window serves to produce a reference beam which is in-line with the scattered object beam. The system is almost common-path and therefore provides much better mechanical stability than conventional ESPI configurations, which have widely separated be...

Wholefiled Optical Metrology: Surface Displacement Measurement Wholefield Optical Metrology: Surface Displacement Measurement